A brief introduction The characteristics of the OLYMPUS MX61/61L product are to shorten inspection time and improve inspection efficiency. The automatic focusing accessory MX-AF transmission light inspection lighting MX-TILLA/MX-TILLBMX is a dedicated automatic focusing accessory that can be used with all reflection light illumination observation methods, even including dark field and differential interference phase contrast observation. Detailed introduction of MX61L Large loading platform equipped with: can be used for 400 * 300mm LCD substrate, 300mm wafer comprehensive inspection (MX61L) Using high NA transmission light concentrators for sharper images Multiple observation methods, lighting methods, and accessories to meet different application requirements Transmission and reflection lighting can be used simultaneously, greatly improving the observation effect of LCD substrates